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sol-gel based ceramic microstructures

Printed From: Sol-Gel Gateway
Category: Sol-Gel Forum
Forum Name: Sol-Gel and derived Materials
Forum Discription: Discussion on Bulk Gels, Aerogels, Xerogels, Drying procedures, Bulk glass and ceramics processing,etc
URL: http://www.solgel.com/sgforum/forum_posts.asp?TID=1556
Printed Date: 16 June 2019 at 12:56am


Topic: sol-gel based ceramic microstructures
Posted By: mems.3D
Subject: sol-gel based ceramic microstructures
Date Posted: 18 March 2008 at 10:33am
I wonder if anyone has experience with making ceramic microstructures. What I want to do is cast a mixture of some ceramic powder and sol on a silicon wafer with a photoresist mask. The sol should be solvent-less otherwise it will attack photoresist. The goal is to create ~10x10x20 micron ceramic posts with open porosity structure. Maximum temperature the substrates can tolerate is ~250C. Ideally all material should be based on alumina. Any suggestions on the materials and process would be greatly appreciated.



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