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Message Icon Topic: sol-gel based ceramic microstructures Post Reply Post New Topic
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mems.3D
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Joined: 05 March 2008
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Quote mems.3D Replybullet Topic: sol-gel based ceramic microstructures
    Posted: 18 March 2008 at 10:33am
I wonder if anyone has experience with making ceramic microstructures. What I want to do is cast a mixture of some ceramic powder and sol on a silicon wafer with a photoresist mask. The sol should be solvent-less otherwise it will attack photoresist. The goal is to create ~10x10x20 micron ceramic posts with open porosity structure. Maximum temperature the substrates can tolerate is ~250C. Ideally all material should be based on alumina. Any suggestions on the materials and process would be greatly appreciated.
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