Sol-Gel

Integrated optical circuits


 

CHEMISTRY

 

PRECURSORS

 

H2C=C(CH3)CO2(CH2)Si(OCH3

H2C=C(CH3)COOH         

Zr(OPr)4                

 

MAPTMS

MAA

ZPO

SUBSTRATE :   Si + SiO2

 

PROCESS

 

WAVEGUIDE MANUFACTURING  (1st approach) :

 

wpeB9.jpg (2613 octets)

 

wpeB5.jpg (964 octets) wpeB6.jpg (1386 octets) wpeB7.jpg (1027 octets) wpeB8.jpg (1029 octets)
Dipping UV exposure Etching Over cladding

 

 

WAVEGUIDE MANUFACTURING  (2nd approach) :

wpeBB.jpg (1555 octets)
wpeBC.jpg (964 octets) wpeBD.jpg (1355 octets) wpeBE.jpg (1052 octets) wpeBF.jpg (1071 octets)
Dipping UV exposure Curing Over cladding

 

WAVEGUIDE CHARACTERISTICS:

 

  • Waveguide size:

  • Core refractive index  

  • Clad refractive index  

  • Core roughness  

  • Passive loss (1.3µm)   

4x7 µm²
1.52
1.42
± 10 nm
0.13 dB/cm

 

BRAGG Gratings manufacturing

bragg.gif (6080 octets) gr.gif (5929 octets)

 

 

RESEARCH GROUP IN THE FIELD

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